Frictionless elliptical contact of thin viscoelastic layers bonded to rigid substrates
نویسندگان
چکیده
منابع مشابه
Ohmic Contact of Cu/Mo and Cu/Ti Thin Layers on Multi-Crystalline Silicon Substrates
Cu-Mo and Cu-Ti contact structures were fabricated on multi-crystalline silicon substrates to provide a low resistance ohmic contact. Deposition steps are done in an excellent vacuum chamber by means of electron beam evaporation and samples are then annealed for the realization of an efficient alloy layer. The effects of process parameters such as film thickness, annealing duration and temp...
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ژورنال
عنوان ژورنال: Applied Mathematical Modelling
سال: 2011
ISSN: 0307-904X
DOI: 10.1016/j.apm.2011.01.029